The challenges that drive us

Brooks Automation

Brooks Semiconductor Solutions Group is a leader in wafer automation and contamination control solutions and services. We offer a full suite of automated handling solutions for both vacuum and atmospheric wafer transfer (vacuum and atmospheric robots, turnkey vacuum and atmospheric wafer handling systems, wafer carrier clean and reticle storage systems, etc.).

Brooks is a leading provider of semiconductor manufacturing solutions worldwide. We have been a key participant in the semiconductor industry for more than 40 years providing precision robotics, integrated automation systems, and contamination control solutions enabling chip manufacturers globally.

Find your Brooks.
We have offices around the globe.

North America

  • Chelmsford, MA
  • Fremont, CA


  • Germany
  • Switzerland


  • China
  • Japan
  • Korea
  • Taiwan
  • Singapore
  • Malaysia